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FLATREG MFC

FLATREG MFC

True Gas Flow Control made accessible. Designed for OEMs.

The FLATREG MFC delivers precise, stable mass flow control in a compact and cost-efficient design, letting OEMs skip the complexity of custom development, reduce design cycle time, and deliver more reliable instruments at lower cost.

  • Built on CHIPREG MFC’s uniquely small 22 mm size — the benchmark in OEM gas flow control
  • Increased flow ranges: up to 40 ls/min
  • Extended pressure range: up to 10 barg
  • Custom variants available on request – e.g. enhanced leak tightness

Technical SpecificationsLS_DS_FLATREG-MFC_en_0925.pdf
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Flow range

0-40 ls/min,

0-20 ls/min

Custom flow range on request

Accuracy

± 0,2% of full scale (0-10% of max flow)

± 2,0% of reading (10%-100% of max flow)

Electrical connection

JST Connector BM06B-GHS-TBT

Pneumatic Connections

In line version (G1/8’’)

Manifold mount

Internal___external_leak_rate

Standard: <10-2 mbar l/s, air

@ 7 barg

On-demand: <10-6 mbar l/s He

100% of the devices are tested in production

Operating Gas

Air

CO2

N2

O2

analog_input_output

0 to 5 V d.c

Operating Voltage V

24 V d.c. ± 10%

Application Applicability

Analytical

Applied Fluidics

Biosciences

Medical Devices

The table below assists you in finding the relevant product based on its variant. For more details, please download the datasheet above.